Vortex

SFT-110, Fluorescent X-ray Coating Thickness Gauge

Name Fluorescent X-ray Coating Thickness Gauge
Type SFT110 Series
Overview New auto focus function allows the sample optical image can be focused within few seconds automatically. Thus the onerous manual adjustment is not required resulting in the dramatic improved throughput.
Features
  • Easy setting
    Optical image of the sample automatically appeared on the display once the sample placed on the stage.
  • 50nm Au plating thickness can be measured precisely in 10 seconds
    Optimum geometry realize higher sensitivity even under micro beam, which enables better measurement accuracy with round 0.1 or 0.2 mm collimator.
  • Measurement without the standard sample.
    Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer film and alloy film can be done easily.
  • Easy positioning by Wide View System
    New Wide View System (option) which enable to observe the whole sample image (size max. 250x200mm), makes easy setting of the measurement position.

Specifications

Elements Measured Atomic Numbers 22(Ti) to 83(Bi)
X-ray Source Air-cooled small X-Ray Tube
Voltage : 50kV
Current: 1mA
Detector Proportional counter
Sample Observation CCD camera (with wide view system)
Focus Laser Pointer
Filter Primary filter automatic switching
Controller Desktop Computer with 19 inch LCD Monitor
Film Thickness
Measurement Software		 PC (Windows 2000) 17-inch CRT
Composition
Measurement Software		 Bulk FP Method
Safety Mechanisms Sample door interlock, Sample crash prevention mechanism, Diagnostic Function
*Windows is a registered trademark of Microsoft Corporation in the United States and other countries.

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